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  • 专利标题:   Producing graphene transfer substrate useful for producing transparent electrode, comprises e.g. growing graphene on upper surface of a wafer to obtain a graphene film, and attaching a supporting substrate on graphene film.
  • 专利号:   KR2017013557-A
  • 发明人:   KIM C Y, KOO B H, PARK K S, YOON S H
  • 专利权人:   JUSUNG ENG JH
  • 国际专利分类:   C01B031/04, H01L021/205, H01L021/316, H01L021/78, H01L029/16
  • 专利详细信息:   KR2017013557-A 07 Feb 2017 H01L-029/16 201720 Pages: 13
  • 申请详细信息:   KR2017013557-A KR106343 28 Jul 2015
  • 优先权号:   KR106343

▎ 摘　　要

NOVELTY - Producing graphene transfer substrate, comprises (a) growing graphene on upper surface of a wafer to obtain a graphene film, (b) attaching a supporting substrate on graphene film, (c) etching the wafer using etching material, and separating the graphene film and the wafer, and (d) attaching the graphene film on a target substrate. USE - The graphene transfer substrate is useful for producing transparent electrode (claimed). ADVANTAGE - The method prevents damage and cracks of graphene film.