• 专利标题:   Electronic apparatus such as transistor has hole portions for scattering edge portions of graphene element respectively, with deficient carbon atoms, and metals connected with edge portions of graphene element.
  • 专利号:   JP2016127238-A
  • 发明人:   JIPPO H
  • 专利权人:   FUJITSU LTD
  • 国际专利分类:   C01B031/02, H01L021/28, H01L021/336, H01L029/417, H01L029/786, H01L051/05, H01L051/30, H01L051/40
  • 专利详细信息:   JP2016127238-A 11 Jul 2016 H01L-029/786 201649 Pages: 27 Japanese
  • 申请详细信息:   JP2016127238-A JP002400 08 Jan 2015
  • 优先权号:   JP002400

▎ 摘  要

NOVELTY - The electronic apparatus such as transistor (1) has hole portions (4c) for scattering edge portions (4a,4b) of graphene element (4) respectively, with deficient carbon atoms. The metals are connected with the edge portions of graphene element. The hole portions are formed with zigzag ends. The metals are connected with the source electrode (5a) and drain electrode (5b) respectively. An insulating film (3) is stacked between edge portions of the graphene element. A gate electrode is stacked in the opposite side of the graphene element. USE - Electronic apparatus such as transistor. ADVANTAGE - The increase of the contact resistance between graphene element and metal is suppressed, and the switching characteristic of the transistor is improved. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method of manufacturing electronic apparatus. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the transistor. Transistor (1) Insulating film (3) Graphene element (4) Edge portions of graphene element (4a,4b) Hole portion (4c) Source electrode (5a) Drain electrode (5b)