▎ 摘　　要

NOVELTY - Tunnelling type acceleration sensor comprises a graphene movable mechanical component. A graphene movable mechanical part is fixedly arranged on the base. The graphene movable mechanical part comprises a fixing part and a movable part and the fixing part is fixed at the end of the base. A source electrode, a drain electrode and a gate are arranged on the base between the base and the graphene movable mechanical part. A source electrode is connected to the movable part of the graphene movable mechanical part and a tunneling component is provided at the drain of the base. USE - The acceleration sensor is useful for detecting mechanical property (claimed). ADVANTAGE - The acceleration sensor better reduces the electro migration phenomenon in the tunneling accelerometer because the graphene material is small; reduces the volume of the acceleration sensor and expand its application range; adopts a unilateral S-type double cantilever structure and has high sensitivity and high seismic performance. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for: (1) tunneling type accelerometer; and (2) manufacturing tunnelling type acceleration sensor. DESCRIPTION OF DRAWING(S) - The drawing shows a top view of the tunnelling type acceleration sensor.