• 专利标题:   Vertical graphene rolling growing device comprises vacuum chamber, high temperature process chamber, vacuum chamber and driving device, where vacuum chamber is equipped with graphene growth substrate feeding roller.
  • 专利号:   CN106756896-A, CN206858655-U
  • 发明人:   HUANG D, LI H, LI X, LI Z, SHI H, WANG Z, WU J
  • 专利权人:   CHONGQING GRAPHENE TECH CO LTD, CHONGQING GRAPHENE TECH CO LTD
  • 国际专利分类:   C23C016/26, C23C016/54
  • 专利详细信息:   CN106756896-A 31 May 2017 C23C-016/54 201747 Pages: 7 Chinese
  • 申请详细信息:   CN106756896-A CN10186735 27 Mar 2017
  • 优先权号:   CN10186735, CN20306595

▎ 摘  要

NOVELTY - Vertical graphene rolling growing device comprises vacuum chamber (1), high temperature process chamber (7), vacuum chamber (8) and driving device, where vacuum chamber is equipped with graphene growth substrate feeding roller (2). The vacuum chamber is provided with graphene substrate rolling material roller (9) and guide roller (10). The vacuum chamber and vacuum chamber are provided with vacuum pump, graphene growth substrate feeding roller and graphene substrate rolling material roller through driving device. The high temperature process chamber is provided with fast heating device (6). USE - Vertical graphene rolling growing device. ADVANTAGE - The vertical graphene rolling growing device is cost effective and has improved the product quality and production efficiency, and cosumes less energy. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a Vacuum chamber (1) Graphene growth substrate feeding roller (2) Fast heating device (6) Vacuum chamber (8) Graphene substrate rolling material roller (9) Guide roller (10)