• 专利标题:   Method for manufacturing semiconductor component, involves providing carrier wafer and silicon carbide wafer, and bonding silicon carbide layer with carrier wafer during splitting process for forming graphene material on carbide layer.
  • 专利号:   DE102016105610-A1, US2017278930-A1, US10134848-B2, US2019081143-A1, US10347723-B2
  • 发明人:   RUHL G, SCHULZE H, LIPPERT G, ZIMMER T
  • 专利权人:   INFINEON TECHNOLOGIES AG, INFINEON TECHNOLOGIES AG
  • 国际专利分类:   H01L021/331, H01L029/72, H01L021/02, H01L021/18, H01L021/265, H01L021/324, H01L021/56, H01L021/78, H01L029/04, H01L029/16, H01L029/165, H01L021/20, H01L021/683, H01L021/762, H01L029/06
  • 专利详细信息:   DE102016105610-A1 28 Sep 2017 H01L-021/331 201767 Pages: 28 German
  • 申请详细信息:   DE102016105610-A1 DE10105610 24 Mar 2016
  • 优先权号:   DE10105610

▎ 摘  要

NOVELTY - The method involves providing a carrier wafer (110) and a silicon carbide wafer (100). A side (101) of the silicon carbide wafer is arranged with the carrier wafer. The silicon carbide wafer is arranged with a silicon carbide layer, which is arranged at the carrier wafer. The silicon carbide wafer is provided with a silicon carbide wafer remaining part. The silicon carbide layer is bonded with the carrier wafer during a splitting process for forming a graphene material on the silicon carbide layer. The carrier wafer is provided with two sides (111, 112). USE - Method for manufacturing a semiconductor component. ADVANTAGE - The method enables providing the carrier wafer and the silicon carbide wafer, and bonding the silicon carbide layer with the carrier wafer during the splitting process for forming the graphene material on the carbide layer, so that manufacturing cost of a semiconductor component can be reduced. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a semiconductor component. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a semiconductor component. Silicon carbide wafer (100) Side of silicon carbide wafer (101) Carrier wafer (110) Sides of carrier wafer (111, 112)