• 专利标题:   Electric component formation method, involves forming graphene layer between silicon layer and metallic layer, performing thermal process at hydrogen atmosphere, and coating carbon containing polymer material on silicon layer.
  • 专利号:   KR1335714-B1
  • 发明人:   LEE T, HONG J R, LEE H I, LEE S G, HAN H T
  • 专利权人:   UNIV YONSEI IND ACADEMIC COOP FOUND
  • 国际专利分类:   H01L021/31
  • 专利详细信息:   KR1335714-B1 05 Dec 2013 H01L-021/31 201401 Pages: 14
  • 申请详细信息:   KR1335714-B1 KR064344 15 Jun 2012
  • 优先权号:   KR064344

▎ 摘  要

NOVELTY - The method involves forming a metallic layer on a silicon layer. A graphene layer is formed between the silicon layer and the metallic layer. A thermal process is performed at hydrogen atmosphere. A carbon containing polymer material is coated on the silicon layer. USE - Electric component formation method. ADVANTAGE - The method enables providing diffusion preventing characteristic to prevent RC retardation phenomenon based on conductivity. The method enables reducing thickness of a diffusion barrier and wiring interval of an electric component. DESCRIPTION OF DRAWING(S) - The drawing shows a top perspective view of an electric component.