• 专利标题:   Multi-station graphene rapid growth apparatus, has fixed platform that is provided with heating device moving device for moving heating device from outside of process chamber outer tube to outside of other process chamber outer tube.
  • 专利号:   CN106801221-A
  • 发明人:   DUAN Y, HUANG D, LI H, LI Z, SHI H, WANG Z, WU J, YU J, ZHANG Y
  • 专利权人:   CHONGQING GRAPHENE TECH CO LTD
  • 国际专利分类:   C23C016/26, C23C016/44
  • 专利详细信息:   CN106801221-A 06 Jun 2017 C23C-016/26 201744 Pages: 12 Chinese
  • 申请详细信息:   CN106801221-A CN10186759 27 Mar 2017
  • 优先权号:   CN10186759

▎ 摘  要

NOVELTY - The apparatus has a graphene growth process chamber (2) that is mounted on a fixed platform (1). The fixed platform of the graphene growth process chamber is provided with a chamber outer tube (21). The heating device (5) is arranged outside the process chamber outer tube. The fixed platform is provided with a heating device moving device (6) for moving the heating device from the outside of a process chamber outer tube to the outside of the other process chamber outer tube. USE - Multi-station graphene rapid growth apparatus. ADVANTAGE - The multi-station graphene rapid elongation equipment reduce waste of resources and the production efficiency. DESCRIPTION OF DRAWING(S) - The drawing shows the schematic diagram of the multi-station graphene rapid growth apparatus. Fixed platform (1) Process chamber (2) Heating device (5) Moving device (6) Chamber outer tube (21)