▎ 摘 要
NOVELTY - The device (5) has a multilayer stack (10) comprising a catalysis layer (160) and a barrier layer (120) covering the support. The support has a recess (140) crossing it right through in its thickness and emerges on one face of the graphene membrane. The catalysis layer is placed in the recess and covers the portion of the barrier layer on the recess. The graphene membrane is provided in the recess and in contact with the catalysis layer. The multilayer stack comprises a hole (170) which passes through it in its thickness, arranged on the recess and opening onto an opposite face of the graphene membrane. USE - Device such as biological sensor, pressure sensor or filtration machine, for filtering molecules and ions in liquid or gaseous medium, e.g. for filtering helium and dihydrogen, for DNA sequencing or for desalination of seawater. ADVANTAGE - The tie layer improves the adhesion of the catalytic layer to the oxide layer, during growth of the graphene membrane. The layer of grip improves the adhesion of the catalysis layer to the barrier layer. The implementation of process reduces the risk of damage to the stack of the catalysis layer and the graphene membrane suspended directly above the hole during the drying of the barrier layer after implementation using a wet etching technique. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method of manufacturing device for graphene membrane. DESCRIPTION OF DRAWING(S) - The drawing shows a cross sectional view of the device for filtering molecules and ions in liquid or gaseous medium. Device (5) Multilayer stack (10) Barrier layer (120) Recess (140) Catalysis layer (160) Hole (170)