▎ 摘　　要

NOVELTY - The utility model claims an electrothermal micro-driver based on heating of graphene, the structure is a cantilever beam structure, comprising a driving layer, a bias layer, graphene heating layer, a supporting layer and an electrode; graphene heating material, heating the driving layer, and different relative position of the driving layer and the bias layer, realizing different direction movement of the cantilever beam. The utility model combines the graphene of good conductivity and thermal conductivity, realizing the electric heating micro-driver with high performance and high driving efficiency. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for: (1) the electrothermal micro-driver based on heating graphene to claim; (2) the electric heating micro-driver based on heating graphene to claim.