• 专利标题:   Graphene thin film electron source for use in vacuum electronic device, has first electrode formed with substrate, second electrode formed with electrode film, and semiconductor layer formed with insulation layer.
  • 专利号:   CN105448621-A
  • 发明人:   BAI B, DAI Q, LI Z, LI C
  • 专利权人:   NAT CENT NANOSCIENCE TECHNOLOGY CHINA
  • 国际专利分类:   H01J001/304, H01J009/02
  • 专利详细信息:   CN105448621-A 30 Mar 2016 H01J-001/304 201629 Pages: 10 English
  • 申请详细信息:   CN105448621-A CN10836321 26 Nov 2015
  • 优先权号:   CN10836321

▎ 摘  要

NOVELTY - The electron source has a first electrode formed with a substrate. A second electrode is formed with an electrode film. The electrode film is made of graphene material. A semiconductor layer is formed with an insulation layer. The insulation layer is made by combination of silicon dioxide, aluminum oxide, silicon nitride and boron nitride material. USE - Graphene thin film electron source for use in a vacuum electronic device (claimed). ADVANTAGE - The electron source has better conductivity, high strength and electric power transmission efficiency. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a graphene thin film electron source manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of a graphene thin film electron source.