• 专利标题:   Masking block used e.g. to form pattern comprises base substrate, gamma-alumina thin film disposed on base substrate, and hexagonal boron nitride thin film doped with carbon and oxygen and disposed on gamma-alumina thin film.
  • 专利号:   US2021164096-A1, KR2021066330-A, KR2314740-B1, US11359277-B2
  • 发明人:   LEE D, PARK J, PARKJAEHYUN, LEE D J
  • 专利权人:   KOREA INST SCI TECHNOLOGY, KOREA INST SCI TECHNOLOGY
  • 国际专利分类:   C23C016/02, C23C016/04, C23C016/34, H01L021/02, H01L021/18, H01L029/16, C23C016/455
  • 专利详细信息:   US2021164096-A1 03 Jun 2021 C23C-016/34 202150 English
  • 申请详细信息:   US2021164096-A1 US880432 21 May 2020
  • 优先权号:   KR155421

▎ 摘  要

NOVELTY - Masking block comprises: a base substrate (10); a gamma-alumina thin film disposed on the base substrate; and a hexagonal boron nitride thin film doped with carbon and oxygen and disposed on the gamma-alumina thin film, where an amount of carbon in the hexagonal boron nitride thin film is 1-15 atom%. The two-dimensional material includes graphene. The pattern includes graphene is synthesized in an atmosphere including a carbon source and an oxygen-containing material. The two-dimensional material includes hexagonal boron nitride or a transitional metal dichalcogenide. USE - The masking block is useful for: forming a pattern (claimed); forming a pattern of two-dimensional material; and manufacturing various electronic elements including an electro-optical modulator, a switching element, a transistor, and optical device. ADVANTAGE - The masking block: is easily bondable and debondable to a bulk material substrate; has a hybrid configuration of gamma-alumina and hexagonal boron nitride i.e. utilized for directly synthesizing a pattern of a two-dimensional material, hence prevents slip, and may be stably bonded to a growth substrate in the process of synthesizing the pattern; may prevent the pattern i.e. transcribed or moved and the pattern or the growth substrate is damaged; and remarkably improves reliability of directly synthesizing a pattern of a two-dimensional material. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for: (1) forming a pattern; and (2) manufacturing a masking block. DESCRIPTION OF DRAWING(S) - The figure shows a cross-sectional view displaying a method for manufacturing a masking block. Base substrate (10) Amorphous alumina thin film (20)