• 专利标题:   Method for transferring graphene film on metal substrate, involves placing heated and dried target substrate on bottom surface of water tank, and syringe used to inject acetone solution into water tank to dissolve protective film.
  • 专利号:   CN112551517-A
  • 发明人:   JIE X, LU W, LI N, XIA Y
  • 专利权人:   INST MICROELECTRONICS CHINESE ACAD SCI
  • 国际专利分类:   C01B032/194
  • 专利详细信息:   CN112551517-A 26 Mar 2021 C01B-032/194 202134 Pages: 9 Chinese
  • 申请详细信息:   CN112551517-A CN10913667 25 Sep 2019
  • 优先权号:   CN10913667

▎ 摘  要

NOVELTY - The method involves spin-coating (S110) a protective film on the graphene film grown on the metal substrate, the etching solution is added to the water tank, and the metal substrate with the graphene film is placed in the etching solution in the water tank. The metal substrate is completely etched. The etching solution is used in the water tank, the syringe is drawn out, and the syringe is used to inject a cleaning solution into the water tank, and the remaining etching solution is diluted to clean the graphene film and the protective film multiple times. The heated and dried target substrate is placed (S140) on the bottom surface of the water tank, the syringe is used to inject the acetone solution into the water tank to dissolve the protective film, and the syringe is used to draw out the acetone solution. The target substrate is taken out (S150) and the target substrate is heated and dried second time to complete the transfer of the graphene film. USE - Method for transferring graphene film on metal substrate. ADVANTAGE - The large-area transfer of graphene on the metal substrate is realized, and the technical effect of the cracking of the graphene film is reduced during the transfer process. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a device for transferring a graphene film on a metal substrate. DESCRIPTION OF DRAWING(S) - The drawing shows a flowchart illustrating the method for transferring a graphene film on a metal substrate. (Drawing includes non-English language text) Step for spin-coating a protective film on the graphene film grown on the metal substrate, the etching solution is added to the water tank, and the metal substrate with the graphene film is placed in the etching solution in the water tank (S110) Step for draw out etching solution in the water tank with a syringe, the cleaning solution is injected into the water tank with the syringe, and the remaining etching solution is diluted to clean the graphene film and the protective film many times (S120) Step for drawn out cleaning solution is drawn out from the water tank with the syringe, and the graphene film and the protective film are adhered and transferred to the target substrate, the target substrate and heating and drying the target substrate for the first time, and the graphene film is tightly attached to the target substrate (S130) Step for placing heated and dried target substrate on the bottom surface of the water tank, the syringe is used to inject the acetone solution into the water tank to dissolve the protective film, and the syringe is used to draw out the acetone solution (S140) Step for taking out target substrate and the target substrate is heated and dried second time to complete the transfer of the graphene film (S150)