• 专利标题:   Graphene electronic device, useful as e.g. FET, comprises graphene channel layer formed on hydrophobic polymer, gate oxide covering channel layer exposed by source and drain electrodes, and gate electrode formed on portion of channel layer.
  • 专利号:   US2013313512-A1, US8835899-B2
  • 发明人:   YANG H, SEO S, LEE S, CHUNG H, HEO J
  • 专利权人:   SAMSUNG ELECTRONICS CO LTD, SAMSUNG ELECTRONICS CO LTD
  • 国际专利分类:   H01L029/66, H01L029/78, B82Y010/00, B82Y040/00, H01L029/06, H01L029/10, H01L029/16, H01L029/786
  • 专利详细信息:   US2013313512-A1 28 Nov 2013 H01L-029/66 201378 Pages: 10 English
  • 申请详细信息:   US2013313512-A1 US957602 02 Aug 2013
  • 优先权号:   KR095971

▎ 摘  要

NOVELTY - The graphene electronic device comprises: a substrate (110); a hydrophobic polymer formed on the substrate; a graphene channel layer (130) directly formed on the hydrophobic polymer; a source electrode (142) arranged on an end of the graphene channel layer and a drain electrode (144) arranged on another end of the graphene channel layer; a gate oxide (112) for covering the graphene channel layer exposed by the source electrode and the drain electrode; and a gate electrode arranged on a portion of the graphene channel layer between the source electrode and the drain electrode. USE - The graphene electronic device is useful as a FET and a radio frequency transistor. ADVANTAGE - The device prevents or reduces adsorption of impurities to be transferred to the graphene and impurities transferred to the heat-treated graphene channel layer using the hydrophobic polymer layer and the passivation layer thus achieving desired device characteristics. DETAILED DESCRIPTION - The graphene electronic device comprises: a substrate (110); a hydrophobic polymer formed on the substrate; a graphene channel layer (130) directly formed on the hydrophobic polymer; a source electrode (142) arranged on an end of the graphene channel layer and a drain electrode (144) arranged on another end of the graphene channel layer; a gate oxide (112) for covering the graphene channel layer exposed by the source electrode and the drain electrode; and a gate electrode arranged on a portion of the graphene channel layer between the source electrode and the drain electrode. The graphene channel layer comprises a mono-layer or bi-layer graphene. An INDEPENDENT CLAIM is included for a method for fabricating a graphene electronic device. DESCRIPTION OF DRAWING(S) - The figure shows a schematic sectional view of a graphene electronic device. Substrate (110) Gate oxide (112) Graphene channel layer (130) Source electrode (142) Drain electrode. (144)