• 专利标题:   Dual-mode non-refrigeration infrared detector heat-sensitive layer structure, has thermo-sensitive film layer provided with amorphous germanium silicon film, where sides of germanium silicon film are connected with vanadium oxide film.
  • 专利号:   CN113380916-A, CN113380916-B
  • 发明人:   HUANG L, LU H, MA Z, WANG C, FANG M, CAI G, GAO J, HUANG S
  • 专利权人:   WUHAN GAOXIN TECHNOLOGY CO LTD
  • 国际专利分类:   H01L031/09, H01L031/18, G01J005/20
  • 专利详细信息:   CN113380916-A 10 Sep 2021 H01L-031/09 202178 Pages: 8 Chinese
  • 申请详细信息:   CN113380916-A CN10443599 23 Apr 2021
  • 优先权号:   CN10443599

▎ 摘  要

NOVELTY - The structure has a thermo-sensitive film layer fixedly connected with an upper end of a protective layer. The thermo-sensitive film layer is provided with an amorphous germanium silicon film. Two sides of the amorphous germanium silicon film are fixedly connected with a vanadium oxide film. The amorphous germanium silicon film and the vanadium oxide film are formed with a gap. The vanadium oxide film is vanadium pentoxide heat-sensitive film, where a material of a carrier concentration enhancing layer is graphene composite ion and vanadium oxide. USE - Dual-mode non-refrigeration infrared detector heat-sensitive layer structure. ADVANTAGE - The structure provides different working scenes with wide application range and low operation cost. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a dual-mode non-refrigeration infrared detector heat-sensitive layer structure manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a side view of a dual-mode non-refrigeration infrared detector heat-sensitive layer structure. (Drawing includes non-English language text).