• 专利标题:   Large area graphene growth apparatus has second heater that is installed at lower portion of chamber, and second heater driving unit is configured to adjust position of second heater with respect to chamber.
  • 专利号:   KR2018060548-A, KR1956175-B1
  • 发明人:   GI C K, CHEOL K G
  • 专利权人:   SETS
  • 国际专利分类:   C23C016/26, C23C016/455, C23C016/52, C01B031/04
  • 专利详细信息:   KR2018060548-A 07 Jun 2018 201844 Pages: 12
  • 申请详细信息:   KR2018060548-A KR160142 29 Nov 2016
  • 优先权号:   KR160142

▎ 摘  要

NOVELTY - The apparatus (100) has a structure portion. The box-shaped chamber (130) is installed on the upper portion of the structure section, and one side of which is connected to the gas inlet (140) and the other side of which is connected to the vacuum unit (150). The first heater (160) is installed on an upper portion of the chamber. The first heater driving unit (163) is configured to adjust a position of the first heater with respect to the chamber. The second heater (170) is installed at a lower portion of the chamber. The second heater driving unit (173) is configured to adjust a position of the second heater with respect to the chamber. USE - Large area graphene growth apparatus. ADVANTAGE - The large-area grown graphenes can be obtained under various conditions, by adjusting the position of the components. DESCRIPTION OF DRAWING(S) - The drawing shows a partially enlarged cross-sectional view of the large area graphene growth apparatus. Large area graphene growth apparatus (100) Box-shaped chamber (130) Gas inlet (140) Vacuum unit (150) First heater (160) First heater driving unit (163) Second heater (170) Second heater driving unit (173)