• 专利标题:   Wide-range graphene high-temperature pressure sensor, has sensor unit connected with metal electrode, main contact point sputtered at side of center area, and bonding substrate etched with contact hole corresponding to contact position.
  • 专利号:   CN104155051-A, CN104155051-B
  • 发明人:   LI M, LI X, LIU S, WANG L, ZHENG L, JIN S
  • 专利权人:   UNIV NORTH CHINA
  • 国际专利分类:   G01L001/18, G01L009/08
  • 专利详细信息:   CN104155051-A 19 Nov 2014 G01L-009/08 201505 Pages: 9 Chinese
  • 申请详细信息:   CN104155051-A CN10413806 21 Aug 2014
  • 优先权号:   CN10413806

▎ 摘  要

NOVELTY - The sensor has a transfer sensor array fixed in a bonding substrate. A composite metal electrode is embedded in the bonding substrate and the transfer sensor array. The transfer sensor array is formed with a main contact point. A sensor unit is connected with the metal electrode. The main contact point is sputtered at a side of a center area. The bonding substrate is etched with a contact hole corresponding to a contact position. The sensor unit is covered with a boron nitride layer and an intermediate graphene layer. The contact hole is filled with metal molybdenum and glass material. USE - Wide-range graphene high-temperature pressure sensor. ADVANTAGE - The sensor can be connected with the sensor array so as to improve reliability of the sensor unit. The sensor utilizes a graphene/boron nitride heterogeneous structure in an effective manner, and has better corrosion resistance effect, high temperature resistance performance, high reliability, high operating precision and wide range of applications, and can provide instant response. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of a wide-range graphene high-temperature pressure sensor.