• 专利标题:   Semiconductor device such as complementary metal oxide semiconductor, has channel layer which consist of semiconductor graphene, wiring containing source, drain and electrode layer of gate and gate-electrode layer.
  • 专利号:   WO2008108383-A1, US2010102292-A1, JP2009502594-X, JP4669957-B2, US8168964-B2
  • 发明人:   HIURA H, NIHEI F, TADA T, KANAYAMA T
  • 专利权人:   NEC CORP, NAT INST ADVANCED IND SCI TECHNOLOGY, NEC CORP, DOKURITSU GYOSEI HOJIN SANGYO GIJUTSU SO, NEC CORP
  • 国际专利分类:   H01L021/8238, H01L021/8244, H01L027/092, H01L027/11, H01L029/06, H01L029/78, H01L029/786, H01L021/04, H01L029/167, H01L029/66
  • 专利详细信息:   WO2008108383-A1 12 Sep 2008 H01L-029/786 200862 Pages: 40 Japanese
  • 申请详细信息:   WO2008108383-A1 WOJP053899 27 Feb 2008
  • 优先权号:   JP052887

▎ 摘  要

NOVELTY - A semiconductor device has channel layer which consist of a semiconductor graphene, wiring containing source, drain and electrode layer of gate and gate-electrode layer which is insulated by channel and gate insulating layer. The electrode layer and channel layer is in the same plane. The wiring contains metal graphene. The graphene has p-type conduction by substituting carbon structure by boron, aluminum, gallium and/or indium. The graphene has n-type conduction by substitution carbon structure by nitrogen, phosphorus, arsenic and/or antimony. USE - Semiconductor device such as complementary metal oxide semiconductor used in field effect transistor. ADVANTAGE - The semiconductor device is economical and reduces the power consumption. The manufacturing method of semiconductor device is simple. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for the manufacture method of semiconductor device.