• 专利标题:   Nano-imprint stamp, has set of stamp bodies in which multiple concavo-convex surfaces are formed, and graphene thin film layers formed in multiple concavo-convex surfaces, where thickness of graphene thin film layers are specific range.
  • 专利号:   KR1063409-B1
  • 发明人:   KIM K, KIM J H, LEE H J, JANG H, AHN J H
  • 专利权人:   KOREA INST MACHINERY MATERIALS
  • 国际专利分类:   B29C033/38, B82B003/00
  • 专利详细信息:   KR1063409-B1 07 Sep 2011 201204 Pages: 14
  • 申请详细信息:   KR1063409-B1 KR133924 23 Dec 2010
  • 优先权号:   KR133924

▎ 摘  要

NOVELTY - The stamp has a set of stamp bodies in which multiple concavo-convex surfaces are formed. Graphene thin film layers are formed in the multiple concavo-convex surfaces. The stamp bodies are made of a material e.g. nickel, cobalt, iron, platinum, gold, aluminum, chromium, copper, magnesium, molybdenum, silicon, tantalum, titanium or amorphous-silicon. Thickness of the graphene thin film layers are 0.4 nm to 40 nm according to pattern size or gap. USE - Nano-imprint stamp. ADVANTAGE - The stamp is inexpensive, easy to manufacture in a time effective manner and small in size. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for manufacturing a nano-imprint stamp. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a method for manufacturing a nano-imprint stamp. '(Drawing includes non-English language text)'