• 专利标题:   Graphene detector and waveguide integrated structure, has set of non-planar fin structures for composing substrate material, where non-planar sheet of graphene material extends entirely over each of set of non-planar fin structures.
  • 专利号:   US2018301569-A1, TW632672-B1, CN108735669-A, TW201838161-A, US10374106-B2
  • 发明人:   JACOB A P
  • 专利权人:   GLOBALFOUNDRIES INC, GLOBALFOUNDRIES US INC, GLOBAL FOUNDRIES INC
  • 国际专利分类:   G02B006/122, H01L031/0232, H01L031/028, H01L031/0352, H01L031/105, H01L031/18, H01L027/14, H01L027/16, H01L021/8234, H01L031/112, G02B006/12, H01L027/144, H01L031/0392
  • 专利详细信息:   US2018301569-A1 18 Oct 2018 H01L-031/0232 201872 Pages: 13 English
  • 申请详细信息:   US2018301569-A1 US486849 13 Apr 2017
  • 优先权号:   US486849

▎ 摘  要

NOVELTY - The structure has a set of non-planar fin structures (12) for composing substrate material. A non-planar sheet of graphene material extends entirely over each of the set of non-planar fin structures, where the non-planar sheet of graphene material is a wraparound structure extends over insulator material between the set of non-planar fin structures and the non-planar sheet of graphene material is formed directly on the substrate material of the set of non-planar fin structures and the non-planar sheet of graphene material is formed directly on an insulator material on the set of non-planar fin structures and the non-planar sheet of graphene material is formed directly on a material that comprises a crystalline structure similar to graphene. USE - Graphene detector and waveguide integrated structure for use in silicon photonic system. ADVANTAGE - The structure implements non-planar designs to reduce density of graphene on footprint, thus improving efficiency of graphene. The structure ensures detector characteristics by quantizing states to amplify signals. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for utilizing graphene detector and waveguide integrated structure. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a graphene detector and waveguide integrated structure. Non-planar fin structures (12) Buried oxide layer (14) Semiconductor material (16) Graphene sheet (20) Boron nitride material (24)