• 专利标题:   Component for vacuum film formation equipment, has molecular orientation controlling film that is formed in tangential direction of molecular orientation direction of organic molecule adhered to base material surface.
  • 专利号:   JP2021138992-A
  • 发明人:   YAMAMOTO K
  • 专利权人:   ULVAC INC
  • 国际专利分类:   C23C014/24, H01L051/50, H05B033/10
  • 专利详细信息:   JP2021138992-A 16 Sep 2021 C23C-014/24 202179 Pages: 7 Japanese
  • 申请详细信息:   JP2021138992-A JP036472 04 Mar 2020
  • 优先权号:   JP036472

▎ 摘  要

NOVELTY - A component (MP) comprises a base material, and a molecular orientation control film formed on the surface of the base material to which organic molecules adhere, and whose tangential direction is molecular orientation direction of the organic molecules adhering to the base material. When an organic material (6) is vaporized or sublimated within a vacuum chamber (1) in a vacuum atmosphere, the vaporized or sublimated organic molecules (61) are attached to and deposited on the surface of a film-forming target component (Sw) in the vacuum chamber to form an organic film (62). USE - Component e.g. implant-proof board and restriction board is used for vacuum film-forming apparatus for forming organic film on substrate, such as glass substrate and sheet-like resin substrate. ADVANTAGE - The components for vacuum film formation equipment in which a continuous duty is possible in view of the point is provided. DESCRIPTION OF DRAWING(S) - The drawing shows a fragmentary perspective view of a structure of a vacuum evaporation system, and a fragmentary sectional view of the vacuum evaporation system from the front side. (Drawing includes non-English language text) Vacuum chamber (1) Organic material (6) Organic molecule (61) Organic film (62) Implant-proof board as component (MP) Film-forming target component (Sw)