• 专利标题:   Making strip shaped graphene layer used as conductive layer in semiconductive device, comprises making drawn carbon nanotube film, disposing carbon nanotube composite, removing polymer material and etching nanotube segment and graphene film.
  • 专利号:   US2013264307-A1, US8580132-B2, CN103359720-A, TW201341302-A, TW452009-B1, CN103359720-B
  • 发明人:   LIN X, JIANG K, FAN S
  • 专利权人:   HON HAI PRECISION IND CO LTD, UNIV TSINGHUA, HONGFUJIN PRECISION IND SHENZHEN CO LTD, UNIV TSINGHUA, HON HAI PRECISION IND CO LTD
  • 国际专利分类:   C01B031/04, B44C001/22, C23F001/00, C23F003/00, B82Y040/00, G03F001/00
  • 专利详细信息:   US2013264307-A1 10 Oct 2013 C01B-031/04 201370 Pages: 13 English
  • 申请详细信息:   US2013264307-A1 US730856 29 Dec 2012
  • 优先权号:   CN10096863

▎ 摘  要

NOVELTY - Making strip shaped graphene layer, comprises: (a) providing graphene film (30) on surface of substrate (20); (b) making drawn carbon nanotube film; (c) disposing carbon nanotube composite (40) on graphene film, where the nanotube composite comprises carbon nanotube structure (400) embedded in polymer material and the nanotube structure comprises drawn carbon nanotube film comprising carbon nanotube segments (411); (d) removing portion of polymer material to expose nanotube segments; (e) etching nanotube segments and graphene film; and (f) removing remaining portion of polymer material. USE - The method is useful for making strip shaped graphene layer (claimed), which is useful as conductive layer in semiconductive device. DETAILED DESCRIPTION - Making a strip shaped graphene layer, comprises: (a) providing a graphene film (30) on a surface of a substrate (20); (b) making at least one drawn carbon nanotube film; (c) disposing a carbon nanotube composite (40) on the graphene film, where the carbon nanotube composite comprises a carbon nanotube structure (400) embedded in a polymer material and the carbon nanotube structure comprises the drawn carbon nanotube film comprising many carbon nanotube segments (411), where each of the carbon nanotube segments is substantially parallel to each other and separated from each other by a strip-shaped gap; (d) removing a portion of the polymer material to expose the carbon nanotube segments; (e) etching the carbon nanotube segments and the graphene film covered by the carbon nanotube segments; and (f) removing a remaining portion of the polymer material. An INDEPENDENT CLAIM is also included for making a strip shaped graphene layer comprising: the step (a) as above per se; (b1) adhering a drawn carbon nanotube film on the graphene film, where the drawn carbon nanotube film comprises the carbon nanotube segments; (c1) coating a polymer material in a liquid state on the drawn carbon nanotube film such that the polymer material permeates into each of the strip-shaped gap; (d1) solidifying the polymer material in liquid state to form a carbon nanotube composite on the graphene film; (e1) removing a portion of the polymer material surrounding the carbon nanotube segments; and the steps (e) and (f) as above per se. DESCRIPTION OF DRAWING(S) - The figure shows a cross-sectional view of the method for making strip shaped graphene layer. Substrate (20) Graphene film (30) Carbon nanotube composite (40) Carbon nanotube structure (400) Carbon nanotube segments (411)