▎ 摘 要
NOVELTY - Device comprises a deposition chamber (30) for depositing graphene on a catalyst metal film (1), a buffer chamber (20) arranged at the inlet side of the deposition chamber for lowing the vacuum compared to the vacuum level of the deposition chamber, and a first conveying roller portion for supporting while stably conveying the catalyst metal film and preventing entering of the external air during while conveying the catalyst metal film. The device produces graphene film by depositing graphene while conveying the catalyst metal film by roll to roll method. USE - The device is useful for producing graphene film (claimed). ADVANTAGE - The device reliably produces graphene film, improves process stability, prevents change in degree of vacuum of deposition chamber and movement of air stream, maintains vacuum level of deposition chamber, and avoids damage of graphene film during transportation and storage. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic representation of the device. Catalytic metal film (1) Buffer chamber (20) Micro connecting passage (21) Deposition chamber (30) Supplying pipe (32) Pipe heater (33)