▎ 摘 要
NOVELTY - A ceramic heater comprises a ceramic substrate comprising (a) aluminum nitride, (b) at least one of magnesium oxide, alumina and spinel, (c) calcium oxide and (d) titanium dioxide, and a resistance heating element. USE - Ceramic heater used in semiconductor manufacturing equipment. ADVANTAGE - The ceramic heater has excellent volume resistance at high temperature, and thermal conductivity at room temperature.