• 专利标题:   Room temperature terahertz detector based on thermoelectric effect of graphene, has ohmic contact electrodes on two ends of effective region of graphene use different thermal conductivity metal materials with different work functions.
  • 专利号:   CN107482109-A
  • 发明人:   LUO X, WANG C, TAN Z, CAO J
  • 专利权人:   SHANGHAI INST MICROSYSTEM INFORMATION
  • 国际专利分类:   H01L035/14, H01L035/30, H01L035/32, H01L035/34
  • 专利详细信息:   CN107482109-A 15 Dec 2017 H01L-035/30 201803 Pages: 7 Chinese
  • 申请详细信息:   CN107482109-A CN10529441 02 Jul 2017
  • 优先权号:   CN10529441

▎ 摘  要

NOVELTY - The room temperature terahertz detector based on the thermoelectric effect of graphene has comprises a silicon substrate. A silicon dioxide (SiO2) film is provided on a silicon substrate. An active region of graphene is provided on the SiO2 film and an antenna. The ohmic contact electrodes on two ends of the effective region of the graphene use different thermal conductivity metal materials with different work functions. The metal materials with different thermal conductivities of different work functions are respectively Gold (Au) and titanium (Ti). USE - Room temperature terahertz detector based on thermoelectric effect of graphene. ADVANTAGE - The room temperature terahertz detector based on thermoelectric effect of graphene has high response rate and high sensitivity, simple preparation process, low cost and good application. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for preparing a room temperature terahertz detector based on the graphene thermoelectric effect. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram of room temperature terahertz detector based on thermoelectric effect of graphene. (Drawing includes non-English language text)