▎ 摘　　要

NOVELTY - The sensor has a graphene layer (304) placed on a first dielectric layer (302). A second dielectric layer (306) is placed on the graphene layer. A source region is placed on the first layer. A drain region is placed on the first layer. A capping layer is placed on portion of substrate (100). A fluid flow path is defined by a channel (102), where first cavity communicates with the channel, and second cavity communicates with the channel. The channel comprises a physical opening formed in the substrate to define gap between bottom surface of the first layer and top surface of the substrate. USE - Graphene bio-sensor for use in life sciences, clinical diagnostic and medical research. ADVANTAGE - The sensor allows a single strand DNA to change measured resistance in an efficient manner. The sensor allows fixed voltage bias to be applied between the source and drain regions such that current is monitored in an efficient manner, while maintaining desired sensitivity of the sensor. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of system for forming graphene sensor. Substrate (100) Channel (102) Dielectric layers (302, 306) Graphene layer (304)