• 专利标题:   Method for depositing high dielectric constant material on graphene surface atomic layer in manufacture of integrated circuit, involves applying electric field to cavity in which silicon substrate with graphene is placed.
  • 专利号:   CN102097297-A, CN102097297-B
  • 发明人:   WANG P, ZHANG W, JIANG T, SUN Q
  • 专利权人:   UNIV FUDAN
  • 国际专利分类:   C23C016/40, C23C016/44, H01L021/02, H01L021/285
  • 专利详细信息:   CN102097297-A 15 Jun 2011 H01L-021/02 201158 Pages: 9 Chinese
  • 申请详细信息:   CN102097297-A CN10545155 16 Nov 2010
  • 优先权号:   CN10545155

▎ 摘  要

NOVELTY - A nickel film of thickness 100-600 nm is formed on one silicon substrate. The graphene is grown on nickel film. The nickel film is etched and the formed graphene is transferred to other silicon substrate. An electric field is applied to cavity so that electron distribution orientation changes and the chemical activity of graphene surface is strengthened. The initial adsorption of atomic layer deposition on graphene surface is finished. A high K gate medium is deposited on graphene surface atomic layer. USE - Method for depositing high K gate medium such as high dielectric constant material (claimed) on graphene surface atomic layer in manufacture of carbon-based integrated circuit. ADVANTAGE - A delocalization phi bond of the graphene surface is destroyed and the electron distribution orientation is changed, under the induction of the electric field, so that uniform high K gate medium is directly deposited on graphene surface atomic layer under the condition of not precipitating a buffer layer in advance. Hence the deposition process is simplified and electrical properties of graphene surface is improved. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view illustrating the method for depositing high K gate medium on graphene surface.