▎ 摘 要
NOVELTY - The sensor has a silicon carbide substrate (1) and a gas sensitive graphene-like layer (3). A gap is provided between the anode and cathode made of silicon oxide, which is formed using the silicon oxide supports (5). The substrate by the method of focused ion beams is formed on a pointed structure. The gas-sensitive graphene-like layer is formed by plasma-chemical etching, and acts as an anode. A graphene-like layer is applied to a top cover (4) of the device, and acts as a cathode (6), and technological holes are located in the corners of the device. USE - Energy-efficient gas-sensitive sensor based on graphene-like structures. ADVANTAGE - The energy consumption of the device is reduced by 30%, and make it in a miniature version without loss of output characteristics, and also increased selectivity and sensitivity to gas molecules. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the top cover of the energy-efficient gas-sensitive sensor based on graphene-like structures. (Drawing includes non-English language text) 1Silicon carbide substrate 3Gas sensitive graphene-like layer 4Top cover 5Silicon oxide support 6Cathode