• 专利标题:   Energy-efficient gas-sensitive sensor based on graphene-like structures has graphene-like layer that is applied to top cover of device, and acts as cathode, and technological holes are located in corners of device.
  • 专利号:   RU217599-U1
  • 发明人:   MOROZOVA I V, KLIMIN V S
  • 专利权人:   MOROZOVA I V
  • 国际专利分类:   G01N027/407
  • 专利详细信息:   RU217599-U1 07 Apr 2023 G01N-027/407 202344 Pages: 7 Russian
  • 申请详细信息:   RU217599-U1 RU108896 01 Apr 2022
  • 优先权号:   RU108896

▎ 摘  要

NOVELTY - The sensor has a silicon carbide substrate (1) and a gas sensitive graphene-like layer (3). A gap is provided between the anode and cathode made of silicon oxide, which is formed using the silicon oxide supports (5). The substrate by the method of focused ion beams is formed on a pointed structure. The gas-sensitive graphene-like layer is formed by plasma-chemical etching, and acts as an anode. A graphene-like layer is applied to a top cover (4) of the device, and acts as a cathode (6), and technological holes are located in the corners of the device. USE - Energy-efficient gas-sensitive sensor based on graphene-like structures. ADVANTAGE - The energy consumption of the device is reduced by 30%, and make it in a miniature version without loss of output characteristics, and also increased selectivity and sensitivity to gas molecules. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the top cover of the energy-efficient gas-sensitive sensor based on graphene-like structures. (Drawing includes non-English language text) 1Silicon carbide substrate 3Gas sensitive graphene-like layer 4Top cover 5Silicon oxide support 6Cathode