• 专利标题:   In-situ growth of graphene-based field effect transistor micro zone heating materials, comprises preparing graphene-based field effect transistor, applying voltage on ends of graphene electrode and allowing the growth of the material layer.
  • 专利号:   CN104894639-A, CN104894639-B
  • 发明人:   DENG L, HE L, JIANG M, LI L, XIE X, WU T, XIE H, WANG H, CHEN L
  • 专利权人:   SHANGHAI INST MICROSYSTEM INFORMATION, SHANGHAI INST MICROSYSTEM INFORMATION
  • 国际专利分类:   C30B025/02, H01L021/20, H01L021/324
  • 专利详细信息:   CN104894639-A 09 Sep 2015 C30B-025/02 201614 Pages: 16 Chinese
  • 申请详细信息:   CN104894639-A CN10316129 10 Jun 2015
  • 优先权号:   CN10316129

▎ 摘  要

NOVELTY - In-situ growth of graphene-based field effect transistor micro zone heating materials, comprises (i) preparing graphene-based field effect transistor, where the graphene micro zone is provided with a narrow edge, providing back gate on the field effect transistor; (ii) applying voltage or current source on both ends of graphene electrode, regulating the back gate voltage, to modulate the resistance of the narrow edged micro zone for generating high temperature narrow edged micro-zone; and (iii) allowing the growth of the material layer on the surface of narrow edged micro-zone. USE - The method is useful for in-situ growth of graphene-based field effect transistor micro zone heating materials (claimed). ADVANTAGE - The method is simple, graphical and suitable for industrialization; can control the shape of the material growth area; and has good uniformity. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a device used for in-situ growth of graphene-based field effect transistor micro zone heating materials comprising graphene-based field effect transistor, graphene with a the narrow micro structure, a back gate provided on the back surface of field effect transistor, a material layer, for in situ growth of narrow edged micro zone.