▎ 摘　　要

NOVELTY - A microelectromechanical system (MEMS) structure comprises a substrate having a through cavity, an electrode layer (E1) formed above the front surface of the substrate and covers the cavity, a piezoelectric layer (P1) formed above the electrode layer (E1), and an electrode layer (E2) formed above the piezoelectric layer (P1). The electrode layer (E1) is two-dimensional material single layer or multiple layers. USE - MEMS structure. ADVANTAGE - The MEMS structure is economically manufactured. The probability of damage or performance degradation caused by backside etching of the MEMS structure is reduced.