• 专利标题:   Doped, passivated graphene nanomesh used in field effect transistor, and semiconductor device, comprises graphene nanomesh comprising nanoholes, passivating element, and dopant bonded to passivating element.
  • 专利号:   US2015069305-A1, US9142471-B2
  • 发明人:   ABOUKANDIL A, MAAROUF A, MARTYNA G J, MOHAMED H, NEWNS D M
  • 专利权人:   ABOUKANDIL A, MAAROUF A, MARTYNA G J, MOHAMED H, NEWNS D M, INT BUSINESS MACHINES CORP, EGYPT NANOTECHNOLOGY CENT
  • 国际专利分类:   H01L023/29, H01L023/31, B82Y030/00, B82Y040/00, C01B031/04, H01L029/16, H01L029/78
  • 专利详细信息:   US2015069305-A1 12 Mar 2015 H01L-023/29 201522 Pages: 18 English
  • 申请详细信息:   US2015069305-A1 US542408 14 Nov 2014
  • 优先权号:   US194976, US542408

▎ 摘  要

NOVELTY - A doped, passivated graphene nanomesh comprises a graphene nanomesh comprising nanoholes formed in a graphene sheet, and carbon atoms which are formed adjacent to the nanoholes; a passivating element bonded to the carbon atoms; and a dopant bonded to the passivating element. The dopant comprises one of an electron-donating element for making the graphene nanomesh, an n-doped graphene nanomesh, and an electron-accepting element for making the graphene nanomesh a p-doped graphene nanomesh. USE - The doped, passivated graphene nanomesh is useful in field effect transistor (claimed), and semiconductor device, graphene field effect transistor, and metal-oxide-semiconductor field-effect transistor (MOSFET). ADVANTAGE - The method of making semiconductor device including the doped, passivated graphene nanomesh, may provide ultra-stable doping of the graphene nanomesh, and can inhibit fluctuation of the dopant concentration. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a field effect transistor comprising the doped, passivated graphene nanomesh.