▎ 摘 要
NOVELTY - The utility model is new type relates to graphene growing equipment technology field, especially relates to one kind large square meter growing graphene and device. Comprising quartz tube, cavity body, metal substrate, the air cavity body internal is hollow, the air cavity body is spiral columnar structure, shape and shape of the air cavity body and the metal base phase matching, the metal substrate along one side the air cavity body in spiral surface, the air cavity body most inner ring of end part and the metal substrate in most end part of ring fixedly connected with the air cavity body of the inner most ring and the most external ring of the same on one side are provided with an air inlet, an air cavity body and the inner upper surface provided with multiple out sum of hole, the quartz tube is sleeved on the air cavity body outside, covering the whole of the air cavity body. The utility model is new type of beneficial effect is: structure is simple, it is good for large square meter type growing graphene, which saves space, at the same time the graphene growing uniformly, increase yield.