• 专利标题:   Large square meter growing graphene device comprises quartz tube, ventilation cavity body, metal substrate, air cavity body with spiral columnar structure, ring end part, air inlet and gas hole.
  • 专利号:   CN204325492-U
  • 发明人:   GAO X, JIANG H, LI Z, SHI H, ZHANG Y, ZHU P, HUANG D
  • 专利权人:   CHONGQING MOXI TECHNOLOGY CO LTD, CHINESE ACAD SCI CHONGQING GREEN INTEL
  • 国际专利分类:   C23C016/26, C23C016/44
  • 专利详细信息:   CN204325492-U 13 May 2015 C23C-016/26 201554 Pages: 7 Chinese
  • 申请详细信息:   CN204325492-U CN20786714 12 Dec 2014
  • 优先权号:   CN20786714

▎ 摘  要

NOVELTY - The utility model is new type relates to graphene growing equipment technology field, especially relates to one kind large square meter growing graphene and device. Comprising quartz tube, cavity body, metal substrate, the air cavity body internal is hollow, the air cavity body is spiral columnar structure, shape and shape of the air cavity body and the metal base phase matching, the metal substrate along one side the air cavity body in spiral surface, the air cavity body most inner ring of end part and the metal substrate in most end part of ring fixedly connected with the air cavity body of the inner most ring and the most external ring of the same on one side are provided with an air inlet, an air cavity body and the inner upper surface provided with multiple out sum of hole, the quartz tube is sleeved on the air cavity body outside, covering the whole of the air cavity body. The utility model is new type of beneficial effect is: structure is simple, it is good for large square meter type growing graphene, which saves space, at the same time the graphene growing uniformly, increase yield.