• 专利标题:   Manufacture of graphene laminated structure used for electronic device, involves plasma-treating surface of hexagonal boron nitride sheet, depositing hexagonal boron nitride sheet on graphene sheet, and forming insulating layer.
  • 专利号:   US2014239256-A1, KR2014105293-A, US9058985-B2
  • 发明人:   KIM S, HAN S, HAN S A, KIM S W
  • 专利权人:   SAMSUNG ELECTRONICS CO LTD, SAMSUNG ELECTRONICS CO LTD, UNIV SUNGKYUNKWAN RES BUSINESS FOUND, SAMSUNG ELECTRONICS CO LTD
  • 国际专利分类:   H01L021/02, H01L029/16, B32B009/00, H01B005/14, H01L029/786, B82Y040/00, C30B029/02, H01L029/267, H01L029/778
  • 专利详细信息:   US2014239256-A1 28 Aug 2014 H01L-021/02 201458 Pages: 24 English
  • 申请详细信息:   US2014239256-A1 US070999 04 Nov 2013
  • 优先权号:   KR019373

▎ 摘  要

NOVELTY - Manufacture of graphene laminated structure involves plasma-treating a surface of hexagonal boron nitride sheet using a fluorine-based gas plasma, depositing the hexagonal boron nitride sheet on a graphene sheet, and forming an insulating layer (317) on a surface of the surface-treated hexagonal boron nitride sheet. USE - Manufacture of graphene laminated structure used for electronic devices (claimed) e.g. top gate transistor used for light-emitting diode. ADVANTAGE - The method enables the manufacture of graphene laminated structure with efficient formation of insulating layer having excellent damage-proof property, high dielectric constant, and desired mechanical-electrical characteristics, by simple process. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for electronic device, which consists of the graphene laminated structure. DESCRIPTION OF DRAWING(S) - The drawing shows the schematic view of the field-effect transistor. Substrate (311) Silica substrate (312) Channel layer (313) Source electrode (314) Insulating layer (317)