• 专利标题:   Forming bilayer hexagonal graphene single crystal domain used as e.g. transistor involves heating catalyst having metal substance and alloy, into chemical vapor deposition reaction chamber, adding carbon/hydrogen/protective gas and cooling.
  • 专利号:   CN102995119-A, CN102995119-B
  • 发明人:   BI H, HUANG F, LIN T, WAN D
  • 专利权人:   CHINESE ACAD SCI SHANGHAI CERAMICS INST
  • 国际专利分类:   C01B031/06, C30B025/00, C30B029/02, C30B029/60, C30B029/68
  • 专利详细信息:   CN102995119-A 27 Mar 2013 C30B-029/02 201360 Pages: 8 Chinese
  • 申请详细信息:   CN102995119-A CN10266167 08 Sep 2011
  • 优先权号:   CN10266167

▎ 摘  要

NOVELTY - Preparation of double-layered hexagonal graphene single crystal domain, involves: putting catalyst containing metal simple substance and alloy, into a chemical vapor deposition reaction chamber, then heating at 400-1100 degrees C, reacting at constant temperature for 0-60 minutes; introducing carbon, hydrogen and protective gas at gas flow rate of 1-1000 sccm, and reacting for 1 min to 20 hours; after completing the reaction, maintaining the gas flow, controlling cooling speed of 10-300 degrees C/minute, and obtaining a TK angle double layered hexagonal graphene single crystal domain. USE - For the preparation of double-layered hexagonal graphene single crystal domain which is used as a transistor and a light modulator in micro-nano electronic and photonic devices (claimed). ADVANTAGE - The method produces double-layered single crystal graphene domain with excellent quality, and double layer coverage of more than 90%; is simple and easy to control process. DETAILED DESCRIPTION - Preparation of double-layered hexagonal graphene single crystal domain, involves: putting catalyst containing metal simple substance and alloy, into a chemical vapor deposition reaction chamber, then heating at 400-1100 degrees C, reacting at constant temperature for 0-60 minutes; introducing carbon, hydrogen and protective gas at gas flow rate of 1-1000 sccm, and reacting for 1 min to 20 hours; after completing the reaction, maintaining the gas flow, controlling cooling speed of 10-300 degrees C/minute, and obtaining a TK angle double layered hexagonal graphene single crystal domain. The carbon source comprises carbon source gas, liquid carbon source and solid carbon source.