▎ 摘　　要

NOVELTY - The detector has a single pixel provided with a gate, a semiconductor substrate and an insulating layer from bottom to top. An upper surface of a drain electrode (4) and a source electrode (5) are horizontally provided with drain electrodes and source electrodes at intervals. A graphene film (6) is covered on an upper surface of the drain electrode and the source electrode. Two sides of the insulation layer are provided with isolation structure (7). The radiation detector array and a reading circuit interface are packaged in a wire bonding manner. USE - Graphene charge coupled device based radiation detector for medical diagnosis, industrial detection and national defense field. ADVANTAGE - The detector is simple in structure, easy to manufacture in large scale, and compatible with complementary metal oxide semiconductor (CMOS) process, and has low cost, and is easy to prepare and produce. The detector effectively collects the carrier by the capacitive coupling, so that the generated current signal is directly output from the single pixel structure, thus realizing random lossless reading, and avoiding the need to adopt transverse transfer charge mode between pixels of the charge coupled device, and hence improving the radiation detection sensitivity and detection limit. The graphene film is covered on the insulating layer and the drain and the upper surface of the source, and does not exceed the range of drain and source definition, thus reducing the crosstalk influence of the array detection, and improving the reliability of the radiation detector. DESCRIPTION OF DRAWING(S) - The drawing shows a structure diagram of the graphene charge coupled device based radiation detector. Gate electrode (1) Semiconductor substrate (2) Insulating layer (3) Drain electrode (4) Source electrode (5) Graphene film (6) Isolation structure (7)