▎ 摘　　要

NOVELTY - A pellicle film comprises a carbyne layer containing a structure in which carbyne molecules are entangled by applying a coating solution prepared by mixing carbyne molecules and a solvent and drying. USE - Pellicle film used in extreme UV lithography during manufacture of semiconductor device and liquid crystal display panel. ADVANTAGE - The pellicle film has high thermal stability, and high strength. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for manufacture of the pellicle film, which involves preparing the coating solution by mixing carbyne molecules and the solvent, applying the coating solution on a substrate, and drying the applied coating solution to form a carbyne layer containing the structure.