• 专利标题:   Three-dimensional integrated circuit for three-dimensional hybrid integration of e.g. graphene field-effect transistors comprises semiconductor device, insulator formed on the semiconductor device, interconnect, and graphene device.
  • 专利号:   US2012181510-A1, US8748871-B2
  • 发明人:   AVOURIS P, WU Y, ZHU W, CHANG J B, HAENSCH W E, LIU F, LIU Z
  • 专利权人:   INT BUSINESS MACHINES CORP, INT BUSINESS MACHINES CORP
  • 国际专利分类:   B82Y040/00, B82Y099/00, H01L021/28, H01L021/336, H01L027/088
  • 专利详细信息:   US2012181510-A1 19 Jul 2012 H01L-027/088 201250 Pages: 20 English
  • 申请详细信息:   US2012181510-A1 US352737 18 Jan 2012
  • 优先权号:   US009280, US352737

▎ 摘  要

NOVELTY - A three-dimensional integrated circuit comprises semiconductor device, insulator (2140) formed on the semiconductor device, interconnect formed in the insulator, and graphene device formed on the insulator. USE - Three-dimensional integrated circuit for three-dimensional hybrid integration of graphene field-effect transistors and semiconductor based devices. ADVANTAGE - The performance of the integrated circuit is improved. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for: (1) multi-layer integrated circuit; and (2) formation of three-dimensional integrated circuit. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of the portion of multilayer circuit including semiconductor device and multiple top-gated graphene devices. Interconnects (114) Insulator layer (2010) Dielectric layer (2011) Insulator (2140) Contact vias (2142)