• 专利标题:   Gas phase deposition furnace for graphene chemical processing, has main body whose upper end is fixedly connected with exhaust device, where right part of outer surface of main body is connected with discharging pipe.
  • 专利号:   CN217324294-U
  • 发明人:   YANG K, CHEN W
  • 专利权人:   DONGGUAN SAIMU XIJIN TECHNOLOGY CO LTD
  • 国际专利分类:   C23C016/26, C23C016/54
  • 专利详细信息:   CN217324294-U 30 Aug 2022 C23C-016/54 202275 Chinese
  • 申请详细信息:   CN217324294-U CN20301533 15 Feb 2022
  • 优先权号:   CN20301533

▎ 摘  要

NOVELTY - The utility model claims a gas phase deposition furnace for graphene chemical processing, comprising a fixing seat, four corners of the lower end of the fixing seat are fixedly connected with a supporting foot, the upper end left part of the fixing seat and the right part of the upper end are provided with a groove, the middle part of the front end of the fixing seat is provided with a mounting groove, the upper groove wall of the mounting groove is fixedly connected with a driving device, the left part of the outer surface of the gas phase deposition furnace main body is fixedly connected with a feeding pipe, the upper end of the gas phase deposition furnace main body is fixedly connected with an exhaust device, the right part of the outer surface of the gas phase deposition furnace main body is fixedly connected with a discharging pipe. The utility model claims a gas phase deposition furnace for graphene chemical processing, through setting the driving device and the exhaust device on the whole device, so that the gas field in the gas phase deposition furnace is changed uniformly, increasing the uniformity of the gas field in the furnace, ensuring the consistency of the processing of the graphene material and multiple products at the same time, and the deposition efficiency is improved.