• 专利标题:   Electro-optic device e.g. phase shifter, has crystalline magnesium oxide seed layer located directly on amorphous insulating cladding layer, and crystalline electro optic layer directly located on crystalline MgO seed layer.
  • 专利号:   WO2021202853-A1, TW202204946-A, US2023152611-A1
  • 发明人:   THOMPSON M, WONGPIYA R, CHANG C
  • 专利权人:   PSIQUANTUM CORP, PSIQUANTUM CORP
  • 国际专利分类:   G02B006/12, C23C014/02, C23C014/06, C23C014/08, C23C014/22, C23C014/30, G02F001/035, G02F001/21, G02F001/225
  • 专利详细信息:   WO2021202853-A1 07 Oct 2021 G02B-006/12 202185 Pages: 43 English
  • 申请详细信息:   WO2021202853-A1 WOUS025342 01 Apr 2021
  • 优先权号:   US003800P, US17995340

▎ 摘  要

NOVELTY - The device has a crystalline electro-optic layer which comprises a ferroelectric waveguide layer and barium titanate. A first waveguide (250) is embedded within the amorphous insulating cladding layer. A ridge structure is located in the electro-optic layer. An additional insulating cladding layer is located on the electro-optic layer. A second waveguide is embedded within the additional insulating cladding layer. The main portion comprises forming doped or vacancy containing strontium titanium oxide electrodes in contact with electro-optic layer and forming electrically conductive leads in contact with the strontium titanium oxide electrodes. The main portion comprises an electro-optic switch or modulator. USE - Electro-optic device such as phase shifter and switches. ADVANTAGE - The method provides a wafer stack with high precision and layer uniformity, with accuracies of up to single-atom resolution. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a wafer stack. Crystalline magnesium oxide seed layer (204) Barium titanate layer (206) Amorphous insulating layer (210) First waveguide (250)