• 专利标题:   Substrate annealing method, involves depositing graphene layer on substrate, forming patterned structure on substrate, covering patterned structure on graphene layer, annealing substrate, and depositing insulating layer on substrate.
  • 专利号:   CN110364434-A
  • 发明人:   FENG C, HONG J, WU Z, LIN Z
  • 专利权人:   HUAIAN IMAGING DEVICE MFR CORP
  • 国际专利分类:   H01L021/02, H01L021/324
  • 专利详细信息:   CN110364434-A 22 Oct 2019 H01L-021/324 201984 Pages: 21 Chinese
  • 申请详细信息:   CN110364434-A CN10652395 19 Jul 2019
  • 优先权号:   CN10652395

▎ 摘  要

NOVELTY - The method involves depositing a graphene layer on a substrate. A patterned structure is formed on the substrate. The patterned structure is partially covered on the graphene layer. The substrate is annealed. An insulating layer is deposited on the substrate before annealing the substrate. The insulating layer is covered on the graphene layer. The insulating layer is removed after annealing the substrate. Graphene oxide is deposited on the substrate. The Graphene oxide is partially covered on the patterned structure. Hydrophilic treatment process is performed on the substrate. USE - Substrate annealing method. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for manufacturing a semiconductor device. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a substrate.