• 专利标题:   Classifier circuit used to form graphene classifier transistor, comprises array of dual gate graphene transistors having e.g. source, top gate and drain, and common output combining output current of dual gate graphene transistors.
  • 专利号:   US2020194557-A1
  • 发明人:   ZHU W, LIU J, RYU H
  • 专利权人:   UNIV ILLINOIS FOUND
  • 国际专利分类:   C01B032/182, H01L029/16, H01L029/786
  • 专利详细信息:   US2020194557-A1 18 Jun 2020 H01L-029/16 202053 Pages: 21 English
  • 申请详细信息:   US2020194557-A1 US706004 06 Dec 2019
  • 优先权号:   US779146P, US706004

▎ 摘  要

NOVELTY - Classifier circuit comprises: an array of dual gate graphene transistors, where each of the transistors has a source, a top gate receiving one of an input voltage to be evaluated or a reference voltage, a bottom or embedded gate receiving the other of the input voltage or reference voltage and a drain, the source and drain contacting a graphene channel, and one of the source and the drain is connected to a voltage source; and a common output combining output current of many dual gate graphene transistors, the output current that varying in response to the difference between the input voltage and the reference voltage. USE - The classifier circuit is useful for forming a graphene classifier transistor (claimed). ADVANTAGE - The classifier circuit forms classifier transistor with high remanent polarization forms dielectric with ferroelectric capability on a low resistivity substrate. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for forming a graphene classifier transistor, comprising forming dielectric with ferroelectric capability on a low resistivity substrate (112), forming a non-ferroelectric oxide layer on the dielectric, forming a recess window in the non-ferroelectric oxide layer, transferring graphene into the recess window, patterning a graphene channel using lithography and etching, forming source/drain contacts on graphene channel, depositing top gate dielectric on graphene channel, and forming a top gate electrode on the top gate dielectric layer. DESCRIPTION OF DRAWING(S) - The figure shows cross-sectional view of graphene ferroelectric transistor, which consists of local embedded-gate and non-ferroelectric gate dielectrics. Graphene ferroelectric transistor (100) Substrate (112) Bottom gate dielectric layer (118) Source terminal (122) Drain terminal (124)