• 专利标题:   Graphene board has support comprising graphene, and adhesive layer adhered to graphene of support.
  • 专利号:   JP2009200177-A, JP5303957-B2
  • 发明人:   MITSUOKA Y, OSHIMA H
  • 专利权人:   DENSO CORP
  • 国际专利分类:   C01B031/02, H01L021/02, H01L027/12
  • 专利详细信息:   JP2009200177-A 03 Sep 2009 H01L-021/02 200959 Pages: 10 Japanese
  • 申请详细信息:   JP2009200177-A JP039263 20 Feb 2008
  • 优先权号:   JP039263

▎ 摘  要

NOVELTY - A graphene board (100) has support comprising graphene (31), and adhesive layer adhered to graphene of support. USE - Graphene board. ADVANTAGE - The graphene board is economical. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for manufacture of graphene board. Single-crystal silicon-carbide substrate (30) is heated to form graphene in the surface of single-crystal silicon-carbide substrate. An adhesive layer is formed on graphene, support is bonded to single-crystal silicon-carbide substrate through adhesive layer, and single-crystal silicon-carbide substrate is peeled from single-crystal silicon-carbide substrate bonded with adhesive layer and support, to obtain graphene board. DESCRIPTION OF DRAWING(S) - The drawing shows sectional view illustrating manufacture of graphene board. Silicon substrate (10) Amorphous silicon (20) Silicon-carbide substrate (30) Graphene (31) Graphene board (100)