▎ 摘 要
NOVELTY - Intelligent chemical gas phase reaction deposition device for preparing graphene, where it comprises a pedestal (1), furnace body (2), a furnace cover (3), a controller (4), an air inlet pipe (5), air outlet pipe and two support legs. The furnace body through the pin is fixed above the base, the furnace cover is arranged above the furnace body, the controller is fixed on the upper of the pedestal, the controller is provided with a PLC. The air inlet pipe and air outlet pipe are respectively arranged at two sides of the furnace body, the air inlet pipe and air outlet pipe are connected with the furnace body, furnace body is equipped with a reaction mechanism. USE - Used as intelligent chemical gas phase reaction deposition device. DETAILED DESCRIPTION - Intelligent chemical gas phase reaction deposition device for preparing graphene, where it comprises a pedestal (1), furnace body (2), a furnace cover (3), a controller (4), an air inlet pipe (5), air outlet pipe and two support legs. The furnace body through the pin is fixed above the base, the furnace cover is arranged above the furnace body, the controller is fixed on the upper of the pedestal, the controller is provided with a PLC. The air inlet pipe and air outlet pipe are respectively arranged at two sides of the furnace body, the air inlet pipe and air outlet pipe are connected with the furnace body, furnace body is equipped with a reaction mechanism. The reaction mechanism comprises a plane moving mechanism, a translation block, a telescopic mechanism, a rotating mechanism, a movable plate, substrate and two clamping mechanism, substrate and the clamping mechanism are set at one side close to the air inlet pipe of the moving plate, the planar moving mechanism, a translation block, an extension mechanism and a rotating mechanism are arranged on the other side of the moving plate, the two clamping mechanisms are respectively arranged on the two sides of the substrate, the plane moving mechanism comprises a first motor, a fixing rod, a fixing plate, a first connecting rod and the second connecting rod, sliding plate and a lifting assembly, the first electric machine and the fixing plate are fixed on the inner wall of the furnace body, first electric machine electrically connected with the PLC, the first motor connected with the first connecting rod, the first connecting rod through the second connecting rod and the sliding plate is hinged. the sliding plate is sleeved on the fixing rod, two ends of the fixing rod are respectively fixedly connected with the first motor and a fixing plate, one side of the moving plate of the lifting component is arranged on the sliding plate, the lifting subassembly and the translation block in transmission manner, the clamping mechanism comprises a side plate, a connecting component, a first gear, a spring and clamping block, the side plate is fixed on the moving plate, the first gear connected through the connecting component and the lateral plate, the clamping block is connected with the first gear through the spring, the spring is in compressed state, the clamping block is propped against the substrate, the rotating mechanism comprises a second motor and two rotating subassembly, the second electric motor is fixed on the moving plate, the second motor electrically connected with the PLC; the two rotating components are respectively set on the two sides of the second electric machine, the rotating component and the clamping mechanism, the rotation assembly comprises a second drive shaft, a second gear and rack, the second motor through the second driving shaft and the second gear in transmission manner, the second gear and the first gear are arranged on the upper part of the rack, the movable plate is sleeved on the rack, the first gear and the second gear are meshed with the rack. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic representation of the intelligent chemical gas phase reaction deposition device.