▎ 摘　　要

NOVELTY - Producing a pellicle involves forming a silicon carbide layer on one side of the substrate. A metal catalyst layer is formed over the silicon carbide layer. A solid carbon source layer is formed over the metal catalyst layer. The mixture is heat-treated by a portion of the solid carbon source layer is supersaturated while diffusing into the metal catalyst layer to form a graphene layer in the silicon carbide layer and the metal catalyst layer followed by removing the metal catalyst layer. USE - Method for producing pellicle for extreme ultraviolet lithography. ADVANTAGE - The method enables producing pellicle with simple, high transmittance for extreme ultraviolet rays, excellent mechanical strength, and high thermal conductivity.