• 专利标题:   Method for manufacturing graphene sensor of touch display device, involves arranging photo-resist coating part with retain region of metal layer, and fixing graphene coating layer on protective film that is arranged on photo-resist layer.
  • 专利号:   CN104536614-A, US2016202613-A1, US9551937-B2, CN104536614-B
  • 发明人:   DI Y, LIU Z
  • 专利权人:   BOE TECHNOLOGY GROUP CO LTD, BOE TECHNOLOGY GROUP CO LTD
  • 国际专利分类:   G06F003/041, G03F007/16, G03F007/20, G03F007/32, G03F007/42, H05K001/09
  • 专利详细信息:   CN104536614-A 22 Apr 2015 G06F-003/041 201548 Pages: 11 Chinese
  • 申请详细信息:   CN104536614-A CN10015480 12 Jan 2015
  • 优先权号:   CN10015480

▎ 摘  要

NOVELTY - The method involves forming a graphene layer on a substrate. A metal layer is formed on the graphene layer. A negative photo-resist coating part is fixed on a metal layer. A photo-resist coating process is carried out by a grey mask plate. The photo-resist coating part is arranged with a retain region of the metal layer. A graphene coating layer is fixed on a protective film that is arranged on a residual photo-resist layer. A photo-resist removing area of the graphene layer is located on a dry corrosion layer. The protective film is made of a resin material. USE - Method for manufacturing a graphene sensor of a touch display device (claimed). ADVANTAGE - The method enables avoiding need of alkaline developing liquid and alkaline stripping solution in a graphene thin film by using a photo-etching technology, thus improving yield rate of the substrate. The method enables reducing production cost of the substrate. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for the following: (1) a graphene sensor (2) a touch display device. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a method for manufacturing a graphene sensor of a touch display device.'(Drawing includes non-English language text)'