• 专利标题:   Transferring graphene film, comprises attaching transfer medium to surface of graphene thin film growing on growth substrate, peeling off growth substrate, sequentially stacking graphene film and target substrate, and applying pressure.
  • 专利号:   CN115161775-A
  • 发明人:   GUO B, QU Y, TAN H, SHEN D, WANG W
  • 专利权人:   JIANGSU JIANGNAN XIYUAN GRAPHENE TECHNOL, CHANGZHOU SIXTH ELEMENT SEMICONDUCTOR CO
  • 国际专利分类:   C30B033/00
  • 专利详细信息:   CN115161775-A 11 Oct 2022 C30B-033/00 202308 Chinese
  • 申请详细信息:   CN115161775-A CN10767015 01 Jul 2022
  • 优先权号:   CN10767015

▎ 摘  要

NOVELTY - Transfer method of graphene film, comprises attaching transfer medium to surface of graphene thin film growing on the growth substrate far away from one side of the growth substrate, peeling off the growth substrate, attaching one side surface of the graphene film away from the transfer medium on the target substrate to form a transfer medium, sequentially stacking the graphene film and target substrate, placing sequentially stacked transfer medium, graphene film and target substrate in a container, applying pressure to transfer medium at a certain temperature and ambient pressure, taking out the sequentially stacked transfer medium, graphene film and target substrate from the container, and peeling off the transfer medium, where the transfer medium is an amorphous substance. USE - The method is useful for transferring graphene film. ADVANTAGE - The method uses the amorphous substance as transfer medium, and realizes the graphene film after transferring the graphene film to the rough surface keeps continuous method. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram of the state of the graphene film and the substrate and the transfer medium in the process. 201Growth substrate 202Graphene film 203Transfer medium 204Target substrate 205Ravine and pores 2021Surface 2022Side surface