• 专利标题:   Transferring graphene to intermediate layer used for preparing graphene electric device, involves mixing polydimethylsiloxane glue with raw substrate, where polydimethylsiloxane glue is solidified into polydimethylsiloxane transition layer.
  • 专利号:   CN103928296-A, CN103928296-B
  • 发明人:   LI T, LIANG C, WANG W, WANG Y
  • 专利权人:   SHANGHAI INST MICROSYSTEM INFORMATION, SHANGHAI INST MICROSYSTEM INFORMATION
  • 国际专利分类:   C01B031/04, H01L021/02, C01B032/184, C01B032/19
  • 专利详细信息:   CN103928296-A 16 Jul 2014 H01L-021/02 201467 Pages: 8 Chinese
  • 申请详细信息:   CN103928296-A CN10015049 16 Jan 2013
  • 优先权号:   CN10015049

▎ 摘  要

NOVELTY - Graphene transfer involves mixing polydimethylsiloxane glue with a raw substrate, where the polydimethylsiloxane glue is solidified into polydimethylsiloxane transition layer. The polydimethylsiloxane transition layer and hard substrate are bonded through a plasma process by using a corrosion liquid. The deionized water is used for washing the grapheme, polydimethylsiloxane transition layer or hard substrate. USE - Method for transferring graphene to intermediate layer (claimed) used for preparing graphene electric device. ADVANTAGE - The method transfers the graphene to intermediate layer in a simple and cost-effective manner on industrial scale. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic flow process diagram of the graphene transferring method. Graphene (2) Silicon oxide (5)