• 专利标题:   Method for providing electrical connection to portion of graphene layer used in e.g. microelectronic device, involves forming recess that create boundary between first portion of recess and second portion of recess.
  • 专利号:   US2010272917-A1, WO2010125231-A1, CN102396084-A, DE112010002623-T5, US8865268-B2, DE112010002623-B4
  • 发明人:   HAQUE S, LEHTINIEMI R K, KARKKAINEN A M, LECHNER L, HAKONEN P, HAQUE S M, LEHTINIEMI R, KAERKKAEINEN A
  • 专利权人:   NOKIA CORP, NOKIA CORP, NOKIA CORP, NOKIA TECHNOLOGIES OY
  • 国际专利分类:   B05D005/12, C23C014/00, C23C014/04, C23C014/46, B82B003/00, H01L021/02, H01L051/00, H01B001/04, H01L029/16, H01L021/28
  • 专利详细信息:   US2010272917-A1 28 Oct 2010 B05D-005/12 201073 Pages: 10 English
  • 申请详细信息:   US2010272917-A1 US387208 28 Apr 2009
  • 优先权号:   US387208

▎ 摘  要

NOVELTY - The method involves forming recess (23) in the graphene layer (1) using focused ion beam, such that the recess creates the boundary between the first portion (25) of recess and second portion(27) of recess. Electrically conductive material (31) made of chromium alloy is deposited over the electrically insulating material (29) made of silicon dioxide. A contact portion (21) made of palladium provides the electrical connection between the first portion of recess and second portion of recess. USE - Method for providing electrical connection to portion of graphene layer used in microelectronic device and nanoelectronic device. ADVANTAGE - The size and shape of the graphene portions can be determined by the user, so that the graphene portions can be adjusted depending on the intended application of the graphene layer. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for apparatus for providing electrical connection to portion of graphene layer. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram of the apparatus for providing electrical connection to portion of graphene layer. Graphene layer (1) Contact portion (21) Recess (23) Portions of recess (25,24) Electrically insulating material (29) Electrically insulating material (31)