• 专利标题:   Transferring graphene films from substrate to another substrate, during manufacturing of e.g. touch display, involve forming material layer on part of surface of first substrate, and attaching second substrate to second surface of layer.
  • 专利号:   US2014162433-A1, WO2014089437-A1, US8822308-B2, KR2015094668-A, EP2928700-A1, JP2016508891-W, CN104981357-A, CN104981357-B, EP2928700-B1, ES2691120-T3
  • 发明人:   WILLNER B I, WILLNER B
  • 专利权人:   GRAPHENE FRONTIERS, GRAPHENE FRONTIERS LLC, GRAPHENE FRONTIERS LLC, AIXTRON SE
  • 国际专利分类:   H01L021/02, H01L021/67, B28B019/00, B44C003/08, H01L021/00, H01L021/30, H01L021/46, B32B037/24, B32B038/08, C01B031/04, B32B007/04, B32B009/00, C01B031/02
  • 专利详细信息:   US2014162433-A1 12 Jun 2014 H01L-021/02 201442 Pages: 14 English
  • 申请详细信息:   US2014162433-A1 US099032 06 Dec 2013
  • 优先权号:   US797471P, US099032, KR717901

▎ 摘  要

NOVELTY - The method comprises: forming a layer of first material (12) on a part of a surface of a first substrate (10), where a first surface of the layer of material is in contact with the first substrate to define an interface (16); attaching a second substrate (18) to a second surface of the layer of material; forming bubbles (22) at the interface; and applying mechanical force, where the second substrate and the layer of material are jointly separated from the first substrate. The layer of material has thickness of less than 1 nm. USE - The method is useful for transferring graphene films from a substrate to another substrate, during manufacturing of solid-state devices e.g. ballistic transistors and spin transistors, touch displays and photovoltaics, chemical sensors, nanopore filters, impermeable coatings for corrosion and/or chemical protection, ultracapacitors, and transmission electron microscopy support. ADVANTAGE - The method is capable allowing reuse of metal substrates for future graphene formation to reduce waste and improve economics of the process, allowing for a scalable, continuous process for graphene film creation, substrate transfer and/or multi-layer structure fabrication, allowing graphene films to be placed on nearly any smooth surface, providing a process, which can transfer graphene to either flexible or rigid substrates and allowing creation and transfer of large area sheets of graphene film. DETAILED DESCRIPTION - The method comprises: forming a layer of first material (12) on a part of a surface of a first substrate (10), where a first surface of the layer of material is in contact with the first substrate to define an interface (16); attaching a second substrate (18) to a second surface of the layer of material; forming bubbles (22) at the interface; and applying mechanical force, where the second substrate and the layer of material are jointly separated from the first substrate. The method further comprises forming a layer of a second material on a part of an opposing surface of the first substrate, attaching the layer of second material to a third substrate, removing the second substrate, attaching a first leader film to the second substrate and the layer of second material, and attaching a second leader film to the first substrate. The layer of material has thickness of less than 1 nm. The material layer comprises a single atomic layer or a set of atomic layers of graphene, and is formed on the first substrate by chemical vapor deposition. The second substrate is attached to the layer of material by one of: adhering through adhesive; laminating; coating; spraying and dipping. The bubbles forming step comprises: preparing solution comprising water and electrolyte; immersing the interface in the solution; forming a cathode at the first substrate, the layer of material, and the second substrate; disposing an anode in the solution at a location remote from the cathode; connecting a power source to the cathode and anode, and passing electric current through the solution generated by the power source. The electric current has a current density of 0.1-2 A/cm2. The anode is placed near the point of separation. The mechanical force applying step comprises pulling the first substrate in a first direction, and pulling the second substrate along with the layer of material in a second direction, where the first and second directions diverge from one another to define an angle of separation of 1-90 degrees. One of the first or second substrate is less flexible than the other substrate. The first substrate is provided in a form of a supply roll. The second substrate is applied to the second surface of the layer of first material in a continuous manner. The second substrate and the layers of material are collected in a continuous manner on a first pickup roll. The first substrate is collected in a continuous manner on a second pickup roll. DESCRIPTION OF DRAWING(S) - The figure shows a schematic view of a method for transferring graphene films from a substrate to another. First substrate (10) Layer of first material (12) Interface (16) Second substrate (18) Bubbles. (22)