• 专利标题:   Electronic device e.g. electronic apparatus, has first electrode which is provided on first surface of graphene and has first opening portion leading to first surface.
  • 专利号:   JP2022107239-A
  • 发明人:   SUDA S
  • 专利权人:   FUJITSU LTD
  • 国际专利分类:   H01L021/28, H01L021/336, H01L027/144, H01L027/146, H01L029/417, H01L029/47, H01L029/786, H01L029/872, H01L031/08, H01L051/05, H01L051/30, H01L051/40
  • 专利详细信息:   JP2022107239-A 21 Jul 2022 H01L-029/786 202265 Pages: 45 Japanese
  • 申请详细信息:   JP2022107239-A JP002069 08 Jan 2021
  • 优先权号:   JP002069

▎ 摘  要

NOVELTY - The electronic device (1A) has a graphene (30) and a first electrode which is provided on the first surface of the graphene and a first opening portion which leads to the first surface. Several overlapping portions (51) overlap with the graphene in parallel through the first opening portion. The first electrode has several holes that are provided as first opening portion. The first surface of the graphene includes a second electrode which is provided separately from the first electrode. The second electrode has a second opening portion that leads to the first face of the graphene. USE - Electronic device such as FETs, Schottky barrier diode (SBD), personal computer, supercomputer, server, smartphone, mobile phone, tablet terminal, sensor, camera, audio equipment, measuring device, testing device, manufacturing apparatus, etc. ADVANTAGE - The electronic device with a connection of low contact resistance between graphene and the electrode is achieved. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram illustrating the electronic device. Electronic device (1A) Graphene (30) Comb-shaped electrode (40) Comb-tooth-shaped electrode (50) Overlapping portion (51)