▎ 摘　　要

NOVELTY - A tantalum carbide-coated carbon material comprises a carbon substrate; and a tantalum carbide coating layer formed on the carbon substrate. The microcracks included in the tantalum carbide coating layer have a maximum width of 1.5-2.6 microm. USE - A tantalum carbide-coated carbon material for LED manufacturing equipment or semiconductor manufacturing equipment. ADVANTAGE - The tantalum carbide-coated carbon material has a reduced width of microcracks generated in a tantalum carbide coating layer. The tantalum carbide-coated carbon material suppresses damage to the carbon substrate due to a high temperature corrosive gas and enables lifespans of carbon material-used manufacturing equipment parts, devices, etc. to be increased by reducing the width of microcracks generated in the tantalum carbide coating layer, thus, minimizing the gas permeating through the microcracks. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for manufacturing a tantalum carbide-coated carbon material which involves preparing a carbon substrate; and forming a tantalum carbide coating layer on the carbon substrate by a chemical vapor deposition (CVD) method, where microcracks included in the tantalum carbide coating layer have a maximum width of 1.5-2.6 microm.